Synergic and Efficient Multi-MEMS for Internet of Things Integrated on CMOS. SEMIoTIC

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Ojectives

The overall objective of this project is to investigate and provide autonomous VLSI solutions to distributed sensor networks, which contribute to minimizing environmental energy costs and materials.


To this end, it is proposed to work at three levels:

  • Device and transducer level. From the experience of the previous project, which has successfully developed a CMOS-MEMS accelerometer, we will advance in the development of new sensing devices in CMOS and post-CMOS-MEMS technology by applying low cost technological processes of relatively low complexity on integrated circuits manufactured in standard CMOS technology.
    • Develop CMOS-MEMS sensor integrated circuits manufactured with standard CMOS technologies and based on the BEOL metal release. In particular, but not necessarily limited to, pressure and Lorentz force magnetometers sensors using the technologies and knowledge acquired in a previous project (MEMSoC).
    • Develop 2-dimensional magnetic sensors, depositing GMR (Giant Magneto Resistive) materials on CMOS integrated circuits.
    • Design energy transducers (photodiodes) and / or select appropriate sensor power source (RF, photovoltaic, magnetic, piezoelectric, etc.)
  • Circuit level. We will propose conditioning circuits, both for sensors and power management, and the data transmission circuits to minimize power consumption. This involves the development of new low-power circuit techniques for energy harvesting and MEMS signal acquisition.Necessary digital and analog auxiliary circuits will also be developed.
    • Design, implement and verify VLSI low-power conditioning and preprocessing circuits suited for developed integrated CMOS-MEMS sensors.
    • Design, implement and verify VLSI circuits for energy harvesting power management.
    • Design, implement and verify required auxiliary circuits.

  • System level. An autonomous sensor node (mote) demonstrator prototype that meets low-power and few resource requirements for the treatment of a multisensor data. It will focus to an application in the field of distributed sensors. The obtained solution must be monolithic were achivable but discrete elements, always ensuring that the dimensions are as small as possible, will be used if required.

    • Select multi-sensor architectures, combining sensors previously designed especially focusing on minimizing crosstalk.
    • Propose an energy harvesting scheme with the appropriate system power needs.
    • Develop at least one mote-type autonomous system.